JPH0178026U - - Google Patents
Info
- Publication number
- JPH0178026U JPH0178026U JP1987174327U JP17432787U JPH0178026U JP H0178026 U JPH0178026 U JP H0178026U JP 1987174327 U JP1987174327 U JP 1987174327U JP 17432787 U JP17432787 U JP 17432787U JP H0178026 U JPH0178026 U JP H0178026U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- sealing material
- airtight sealing
- resistant
- sandwiched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987174327U JPH0178026U (en]) | 1987-11-13 | 1987-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987174327U JPH0178026U (en]) | 1987-11-13 | 1987-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0178026U true JPH0178026U (en]) | 1989-05-25 |
Family
ID=31466190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987174327U Pending JPH0178026U (en]) | 1987-11-13 | 1987-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0178026U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001068538A (ja) * | 1999-06-21 | 2001-03-16 | Tokyo Electron Ltd | 電極構造、載置台構造、プラズマ処理装置及び処理装置 |
| JP2007035886A (ja) * | 2005-07-26 | 2007-02-08 | Ngk Insulators Ltd | 給電部材及びそれを用いた半導体製造装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5046074A (en]) * | 1973-08-28 | 1975-04-24 |
-
1987
- 1987-11-13 JP JP1987174327U patent/JPH0178026U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5046074A (en]) * | 1973-08-28 | 1975-04-24 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001068538A (ja) * | 1999-06-21 | 2001-03-16 | Tokyo Electron Ltd | 電極構造、載置台構造、プラズマ処理装置及び処理装置 |
| JP2007035886A (ja) * | 2005-07-26 | 2007-02-08 | Ngk Insulators Ltd | 給電部材及びそれを用いた半導体製造装置 |